The experimental precision achievable in modern experiments on ep-scattering allows for measuring the cross section and spin asymmetries in Bethe-Heitler (BH) and semi-inclusive deep inelastic scattering (SIDIS) processes with unprecedented accuracies. The QED radiative correction is one serious source of systematical uncertainties and therefore must be known with any predetermined accuracy. Several available calculations provide only leading logarithm accuracy (for BH), performed only for unpolarized target (for SIDIS), and/or have certain other limitations. In this report we present the results of exact calculation of RC for BH process for unpolarized target as well as for both longitudinally and transversely polarized targets. Details of the calculations of the three key components such as i) the calculation of the cross section of two-photon-emission process and analytic integration over additional kinematical variables, ii) extraction of infrared divergence using the dimensional regularization, and iii) calculation of loop effects with extraction and complete cancellation of the infrared divergence, are discussed. Also we present an approach for exact calculation of RC in semi-inclusive process. The general task of exactly calculated RC in semi-inclusive processes for arbitrary target polarization requires the calculation of the covariant SIDIS hadronic tensor, important intermediate quantity. Recent results for its calculation are presented and discussed.