Liqun Wang, E.S. Gillman

Center for Materials research, Norfolk State University

700 Park Ave, Norfolk, VA 23504

In this experiment, X-ray Photoelectron Spectroscopy (XPS) technique was applied to reveal the atomic concentration of LaSrMnO sample surface. Auger peaks, La MNN and Mn LMM around Mn 2p peak, affect the quantification result in Mg anode mode. However, we can get rid of this effect by selecting Al anode. The spectra obtained under two anodes and the correspondingly quantification result were compared. The anode energy was 200watts, x-ray source high voltage was 15 keV, and the ultra-high vacuum (HUV) of was 1.88 x 10 ^–10 torr. XPS sputtering depth-profiling technique was also applied on this sample by bombardment with Ar⁺-ions. A depth profile spectrum and depth quantification result based on the spectrum was obtained. The Mg anode was used, anode energy was 200watts, x-ray source high voltage was 15keV, and UHV of system was 1.30 x 10^-9torr.