This block includes beam width (x and y, assuming gaussian distribution), the fast raster pattern and size parameters, and x/y/z position offsets for the beam-on-target spot. All distances are in cm.
gen.xwid = 0.008868 ; beam width - one sigma (cm) (89microns) gen.ywid = 0.004235 ; beam width - one sigma (cm) (42microns) targ.fr_pattern = 1. ; raster pattern: 1=square, 2=circular targ.fr1 = 0.1 ; horizontal size OR inner radius(2) targ.fr2 = 0.1 ; vertical size OR outer radius(2) targ.xoffset = 0.0 ; target x-offset (cm) targ.yoffset = 0.0 ; target y-offset (cm) targ.zoffset = 0.06 ; target z-offset (cm) z_tar=nominal+zoffset