MEGroup Specifications
General Vaccum Ranges
Low Vacuum
105 Pa < System Pressure > 3.3 x 103 Pa
(750 Torr < System Pressure > 25 Torr)
Medium Vacuum
3.3 x 103 Pa ≤ System Pressure > 10-1 Pa
(25 Torr ≤ System Pressure > 7.5 x 10-4 Torr)
High Vacuum
10-1 Pa ≤ System Pressure > 10-4 Pa
(7.5 x 10-4 Torr ≤ System Pressure > 7.5 x 10-7 Torr)
Very High Vacuum
10-4 Pa ≤ System Pressure > 10-7 Pa
(7.5 x 10-7 Torr ≤ System Pressure > 7.5 x 10-10 Torr)
Ultra High Vacuum
10-7 Pa ≤ System Pressure > 10-10 Pa
(7.5 x 10-10 Torr ≤ System Pressure > 7.5 x 10-13 Torr)
Extreme High Vacuum
10-10 Pa < System Pressure
(7.5 x 10-13 Torr < System Pressure)