The yields are normalized to charge, electronic efficiency, computer dead time, prescale factor. No boiling correction was applied, but that shouldn't affect the solid targets.
Additionally, all the yields for a given target and setting were normalized so that they're all on the same plot (and around 1, to easier see the problem).
Carbon at 40 degrees, lowest setting, seems fine:

All settings at 18 degrees for carbon and dummy:


Highest setting at 18 degrees, helii, dummy, and carbon.


For reference, here are the relative thicknesses of dummy/cell walls:
Hydrogen - 7.557
Deuterium - 7.614
Helium-3 - 7.557
Helium-4 - 6.896

Dummy: closer look

Moved to here .
Helium-3: closer look

Moved to here .


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